cn
×
The current position:Home > Application > Linear motors are used in semiconductor industry
Linear motors are used in semiconductor industry
The linear motor adopts the direct drive mode, cancels all intermediate links between the motor and the work table, and reduces the length of the feed drive chain of the work table to zero. It replaces the linear motion mode of the traditional rotary motor and the mechanical conversion mechanism which rotates into linear motion. Linear motor has the following advantages:
When accelerating or decelerating, it has a large acceleration and deceleration. The maximum acceleration of the linear motor can reach 1g to 5g (g is gravity acceleration). The feed acceleration of rotary motor + ball screw drive is only 0.1g to 0.3g.
The feed speed is high, the actual maximum speed of linear motor can reach 2.5m/s to 3m/s, while the traditional rotary motor + ball screw drive only 1m/s feed speed
Smooth operation. There is no mechanical transmission link between the linear motor and the work table, and the work is driven by magnetic force, so the operation is stable, the response is fast, the noise is small, the transmission stiffness is large, and the positioning accuracy and repeat positioning accuracy are high.
Large starting thrust. The starting thrust is related to the wire diameter, gate number and current through the motor of linear motor winding.
Mechanical and electrical protection, and the ability to withstand harsh environment;
Easy maintenance and replacement, simple maintenance, long life;
Direct drive mode, travel length is not limited